Study of Fowler-Nordheim tunneling current oscillations in ultra-thin insulator MOS structure by interference method

Interference method is introduced to study the Fowler-Nordheim tunneling cu rrent oscillations. An accurate and simple formula for measuring the oxide thickness and the electron effective mass in the conduction band of the oxi de is given. A comparison between the results calculated directly from the Schrodinger equation and those from the interference method for the triangu lar barrier case shows that the interference method suits very well for stu dying Fowler-Nordheim tunneling current oscillations. The interference meth od reveals the wave nature of the electron tunneling in the barrier. An imp ortant feature of this method is that it may be applicable to various shape s of potential barriers and wells. We also analyze the experimental results and give the physical meanings of them.