Accurate modeling and efficient parameter extraction of a small signal equi
valent circuit of MOS transistors for high-frequency operation are presente
d. The small-signal equivalent circuit is based on the quasi-static approxi
mation which was found to be adequate up to 10 GHz for MOS transistors fabr
icated by a 20 GHz cutoff frequency technology. The extrinsic components an
d substrate coupling effects are properly included. Direct extraction is pe
rformed by Y-parameter analysis on the equivalent circuit in the linear and
saturation regions of operation. A low-noise amplifier is used to illustra
te the effects on circuit performance due to accurate inclusion of extrinsi
c components in the model. Good agreement between simulated results and mea
sured data on high-frequency transistor characteristics has been achieved.