We have deposited CaTiO3 thin films on SrRuO3 electrode layers on SrTiO3 an
d LaAlO3 substrates by pulsed laser deposition. The low-frequency dielectri
c properties were measured from 4 to 300 K. We found that the dielectric co
nstants of 1-mu m-thick CaTiO3 films are very close to that observed in the
bulk materials. The dielectric loss depends on the temperature and is on t
he order of 10(-4) at low temperature. The dielectric constants of the film
s can be tuned by electric field by 6% at room temperature and 10% at 200 K
. (C) 2000 American Institute of Physics. [S0003- 6951(00)01321-8].