We hare fabricated heterostructure barrier varactors (HBV) on a copper subs
trate, which offers reduced spreading resistance, and improved thermal cond
uctivity compared to an LnP substrate. The devices are fabricated without d
egrading the electrical characteristics. The three-barrier HBV material gro
wn by MOVPE has a leakage current of only 0.1 mu A/mu m(2) at 19 (V) under
bar, The maximum capacitance is 0.54 fF/mu m(2). In It frequency tripler ex
periment a maximum output power of 7.1 mW was generated at 221 GHz with a f
lange-to-flange efficiency of 7.9%.