Densely packed PIE shaped vertical-cavity surface-emitting laser array incorporating a tapered one-dimensional wet oxidation

Wavelength-division-multiplexing (WDM) photonic integrated emitter (PIE) ve rtical-cavity surface-emitting laser (VCSEL) arrays are fabricated using a post growth wet oxidation technique. High-density integration of WDM VCSEL arrays is possible by combining the technique of one-dimensional oxidation and large-scale tapered oxidation, Eight channels are integrated into a cir cle of 60 mu m in diameter. Seven channels are found to operate as lasers, The lasing wavelengths range from 823 to 836 nm corresponding with the dist ance between the VCSEL mesa and the tuning trench. The successful demonstra tion of incorporating wet oxidation into the wavelength control of the PIE VCSEL array opens a new way of fabricating mask-defined densely packed WDM VCSEL arrays.