This paper reports the hot electron induced RF performance degradation in m
ultifinger gate nMOS transistors within the general frame work of the degra
dation mechanism. The RF performance degradation of hot-carrier stressed nM
OS transistors can be explained by the transconductance degradation, which
is resulted from the interface state generation. It has been found that the
pr performance degradation, especially minimum noise figure degradation, i
s more significant than de performance degradation. From the experimental c
orrelation between RF and de performance degradation, RF performance degrad
ation can be predicted just by the measurement of de performance degradatio
n or the initial substrate current. From our experimental results, hot elec
tron induced RF performance degradation should be taken into consideration
in the design of the CMOS RF integrated circuits.