The crystal structure and electrical properties were investigated for (001)
- and (116)-oriented SrBi2Ta2O9 (SBT) thin films deposited on (100) SrTiO3
and (100)SrRuO(3)parallel to(100)SrTiO3 substrates, and (110) SrTiO3 and (1
10)SrRuO(3)parallel to(110)SrTiO3 substrates, respectively. Both oriented S
BT films were epitaxially grown with high crystal perfection, and twinning
existed in the (116)-oriented one. Both oriented SBT films were found to fo
rm c/6 lattice displacements to relax the stress. The interface of the (001
)-oriented film did not include misfit dislocations, defects, and an interf
acial layer, and that of the (116)-oriented film included the lattice strai
n contrast due to an irregular atomic arrangement. The electrical property
of the SBT film shows anisotropy of the ferroelectricity along the c- and a
-axis directions; the remanent polarizations of the (001)- and (116)-orient
ed SBT films were 0 and 10.5 mu C/cm(2), respectively. (C) 2000 American In
stitute of Physics. [S0021-8979(00)02111-3].