Off-axis electron holography is used to examine a single thin InGaN quantum
well in GaN viewed in cross-section. The results show a phase offset acros
s the well, which, under weakly diffracting conditions, is an approximately
linear function of specimen thickness. This phase offset is ascribed to a
change Delta V-0 in the specimen mean inner potential V-0 caused by a piezo
electric field induced by misfit strains in the InGaN layer. This paper exa
mines the dependence of the phase offset on the diffracting conditions and
on thin foil relaxation effects. It is shown that relaxation is negligible
for the film thicknesses involved. Using a range of weakly diffracting cond
itions, the phase offset is measured as Delta V-0/V-0 = 0.042 +/- 0.012. Zo
ne axis convergent beam electron diffraction patterns were taken and compar
ed to simulations to determine the crystal polarity, showing the magnitude
of the inner potential increased in the [0001] direction. By using dark-fie
ld displacement fringes to measure the InGaN layer thickness, and recent es
timates of V-0, the magnitude of the piezoelectric field is determined. Thi
s paper assesses the accuracy and limitations of electron holography for th
e studies of electric fields in other GaN structures.