Molecular or atomic oxygen as the transported species in oxidation of silicon

There is a general belief that the oxidation of silicon is due to the trans port of molecular oxygen through the growing oxide. However, several recent experimental results have shown that atomic oxygen is also a possible cand idate fur the transported species. This paper discusses which of these two candidates is the most likely transported species, considering both traditi onal arguments and these based on more recent experimental results. This di scussion shows that the experimental results traditionally used as argument s for molecular oxygen being the transported species are equally valid for atomic oxygen as the transported species. However more recent experimental results strongly support atomic oxygen, not molecular oxygen, as the transp orted species. The conclusion is that atomic oxygen is the more likely cand idate For the transported species in the oxidation of silicon. (C) 2000 The Electrochemical Society. S0013-4651(99)07-116-5. All rights reserved.