Oxygen metastable defects in calcium titanate thin films

Metastable defects of oxygen in calcium titanate thin films with perovskite structure were studied. Thin films of calcium titanate were deposited by a magnetron sputtering method. The oxygen defects were evaluated, using the results of oxygen diffusion experiments. The thin film process had tendenci es of creation of a large amount of oxygen point defects and the wide range of non equilibrium solid solution at room temperature. The crystal distort ion was increasing with deviation from the stoichiometric composition. Alth ough the metastable defects were decreasing due to the annealing, annealed samples had more oxygen defects in a few magnitude orders than single cryst als.