Evacuating flat glass panels

Citation
Re. Collins et al., Evacuating flat glass panels, J VAC SCI A, 18(3), 2000, pp. 1035-1037
Citations number
5
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
ISSN journal
07342101 → ACNP
Volume
18
Issue
3
Year of publication
2000
Pages
1035 - 1037
Database
ISI
SICI code
0734-2101(200005/06)18:3<1035:EFGP>2.0.ZU;2-I
Abstract
A method of evacuating flat glass panels through a small pumpout tube is de scribed. In order to avoid breakage, the end of this pumpout tube, which is located outside a bakeout oven, has to be mounted in an O-ring fitting, wh ich exerts little force on the tube during evacuation and bakeout. This is achieved first by allowing axial movement of the tube within the O-ring fit ting, and second by attaching the vacuum fitting to a bracket, which in tur n is fixed to a metal vacuum cup on the glass panel inside the oven. This m ethod has several advantages over conventional evacuation techniques, inclu ding enabling the pumpout tube to be situated in a protected location in th e edge of the glass panel, and permitting the panel to be baked at high tem peratures. (C) 2000 American Vacuum Society. [S0734-2101(00)04203-2].