Deposition and characterization of YSZ thin films by aerosol-assisted CVD

Thin films of ionic-conducting electrolyte yttria-stabilized zirconia (YSZ) have been prepared on Si(lll) substrates by aerosol-assisted chemical vapo r deposition (AACVD), using the beta-diketonate precursors zirconium acetyl acetonate, Zr(acac)(4), and yttrium acetylacetonate, Y(acac)(3), in the sub strate temperature range of 550-700 degrees C. YSZ thin films were homogene ous and transparent with a cubic fluorite structure. The compositions of th e thin films are very close to those of mixed solution precursors at deposi ted temperatures. The electrical property investigation demonstrated that t he ionic conductivity in the surface layer of the as-deposited film is much higher, and its activation energy is slightly less than that of the YSZ si ngle crystal material. (C) 2000 Elsevier Science B.V. All rights reserved.