Relative yields, mass distributions and energy spectra of cluster ions sputtered from niobium under keV atomic and polyatomic gold ion bombardment

Authors
Belykh, SF Habets, B Rasulev, UK Samartsev, AV Stroev, LV Veryovkin, IV
Citation
Sf. Belykh et al., Relative yields, mass distributions and energy spectra of cluster ions sputtered from niobium under keV atomic and polyatomic gold ion bombardment, NUCL INST B, 164, 2000, pp. 809-819
Citations number
48
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
ISSN journal
0168583X → ACNP
Volume
164
Year of publication
2000
Pages
809 - 819
Database
ISI
SICI code
0168-583X(200004)164:<809:RYMDAE>2.0.ZU;2-4
Abstract
In the present work, the comparative studies of relative yields, mass distr ibutions and kinetic energy spectra of secondary Nb-n(+) ions (n = 1-16) sp uttered from niobium target by atomic and polyatomic Au-m(-) projectiles (m = 1-3) with the energy E-0 = 6-18 keV/atom have been carried out. The stro ng effect of anomalously high non-additivity of metal sputtering as positiv e large cluster ions under polyatomic ion bombardment was found. The compar ison and discussion of the results obtained for Nb and for Ta are presented . (C) 2000 Elsevier Science B.V. All rights reserved.