Determination of time-of-flight distributions of sputtered oxygen and carbon atoms by resonant multi-photon ionization

In this contribution measurements of time-of-flight (TOF) distributions of sputtered oxygen and carbon atoms obtained at a recently completed set-up a re reported. Carbon atoms are released by bombardment of a graphite target by 6 keV argon ions. Atomic oxygen is sputtered from an oxidized titanium f oil. In the case of sputtering of the titanium foil also titanium atoms and TiO molecules are detected. For resonant ionization of oxygen and carbon a toms a (2 + 1) single-color resonant ionization scheme is applied. TOF dist ributions are measured by delaying the ionizing laser pulse with respect to the ion pulse. The atomic oxygen density is estimated by a comparative mea surement with a spectral close two-photon transition of xenon. (C) 2000 Els evier Science B.V. All rights reserved.