Angular resolved energy distributions of sputtered atoms at low bombardingenergy

In this contribution, measurements of energy distributions of sputtered met al atoms (tungsten and aluminum), released from polycrystalline metal targe ts by bombardment with noble gas ions (argon and xenon, respectively) in th e energy range between 150 and 250 eV, are reported. Laser induced fluoresc ence spectroscopy in connection with a special designed detection geometry is applied to study energy distributions of atoms ejected in selected emiss ion angles. Normal and oblique incidence is investigated. In both cases, sy stematic changes of the measured energy distribution with the emission angl e are observed. The experimental distributions are compared to simulations performed by the Monte-Carlo code TRIM.SP. (C) 2000 Elsevier Science B.V. A ll rights reserved.