2D Monte Carlo simulation of proton implantation of superconducting YBa2Cu3O7-delta thin films through high aspect ratio Nb masks

Authors
Peng, NH Chakarov, I Jeynes, C Webb, R Booij, W Blamire, M Kelly, M
Citation
Nh. Peng et al., 2D Monte Carlo simulation of proton implantation of superconducting YBa2Cu3O7-delta thin films through high aspect ratio Nb masks, NUCL INST B, 164, 2000, pp. 979-985
Citations number
22
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
ISSN journal
0168583X → ACNP
Volume
164
Year of publication
2000
Pages
979 - 985
Database
ISI
SICI code
0168-583X(200004)164:<979:2MCSOP>2.0.ZU;2-Z
Abstract
Perturbation of proton beam damage profile due to sidewall interactions in very high aspect ratio implant masks has been studied using Monte Carlo sim ulations. The model structure is composed of amorphous Nb metal mask, cryst alline high temperature superconducting YBa2Cu3O7-delta (YBCO) thin film, a nd amorphous LaAlO3 substrate. The simulation results reveal the existence of enhanced proton beam penetration in target materials due to sidewall int eractions. (C) 2000 Elsevier Science B.V. All rights reserved.