Monte Carlo calculation of elastic recoil H-atom emission induced by fast electron impact

Citation
T. Horiki et A. Koyama, Monte Carlo calculation of elastic recoil H-atom emission induced by fast electron impact, NUCL INST B, 164, 2000, pp. 986-991
Citations number
15
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
ISSN journal
0168583X → ACNP
Volume
164
Year of publication
2000
Pages
986 - 991
Database
ISI
SICI code
0168-583X(200004)164:<986:MCCOER>2.0.ZU;2-O
Abstract
Production of recoil H-atoms and their transportation in a-Si:H are calcula ted by using a Monte Carlo simulation program in order to evaluate the suit ability of the electron impact method for elastic recoil detection analysis of H-atoms. Contained H-atoms are assumed to be homogeneously distributed with the concentration of 30 at.%. Energy of electrons is set to be 32 keV and incident angle 0.5 degrees with respect to the surface. Dependence of e nergy distributions of emitted H-atoms on the depth from which they are ori ginated is examined for the surface layer with the depth of 0-8 Angstrom an d possibility of H-atom depth profiling is discussed. (C) 2000 Elsevier Sci ence B.V. All rights reserved.