A system-level simulation of complex multi-domain microsystems by using analogue hardware description languages

A simulation approach is presented, which permits the simulation of spatial ly distributed fields with behavioral models of other physical effects and accompanying electronics within a single simulator environment. The final s ystem-level model is a blend of finite-element, analytical, semi-analytical and parametric behavioral models with complex analogue and digital circuit networks. Previously evaluated calculations revealed successful simulation of finite element models with more than 25 000 nodes by using analogue sim ulators with hardware description language. The relative error of static ca lculations in comparison with commercial finite element simulators is bette r than 0.002% and 0.08% for 2D and 3D models, respectively. The results obt ained in transient model verification proved the accuracy of the method. Th e simulation of the flow sensor system, whose functionality is governed by coupled fluidic-thermal-electric domains, is employed to show the feasibili ty of the method for complex microsystem modeling. (C) 2000 Elsevier Scienc e S.A. All rights reserved.