Submicron metal oxide structures by a sol-gel process on patterned substrates

Authors
Bechinger, C Muffler, H Schafle, C Sundberg, O Leiderer, P
Citation
C. Bechinger et al., Submicron metal oxide structures by a sol-gel process on patterned substrates, THIN SOL FI, 366(1-2), 2000, pp. 135-138
Citations number
26
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090 → ACNP
Volume
366
Issue
1-2
Year of publication
2000
Pages
135 - 138
Database
ISI
SICI code
0040-6090(20000501)366:1-2<135:SMOSBA>2.0.ZU;2-2
Abstract
We report about a combination of micro-contact-printing and the sol-gel tec hnique which results in structures in the micron- and submicron range. This technique which is here demonstrated on electrochromic tungsten oxide does not rely on vacuum methods and may therefore be easily upscaled to large a reas. (C) 2000 Elsevier Science S.A. All rights reserved.