Dielectric constant measurement of thin films by differential time-domain spectroscopy

Authors
Jiang, ZP Li, M Zhang, XC
Citation
Zp. Jiang et al., Dielectric constant measurement of thin films by differential time-domain spectroscopy, APPL PHYS L, 76(22), 2000, pp. 3221-3223
Citations number
9
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
APPLIED PHYSICS LETTERS
ISSN journal
00036951 → ACNP
Volume
76
Issue
22
Year of publication
2000
Pages
3221 - 3223
Database
ISI
SICI code
0003-6951(20000529)76:22<3221:DCMOTF>2.0.ZU;2-S
Abstract
We present a theoretical model and preliminary experimental results on the dielectric constant measurement of thin films by using differential time-do main spectroscopy. This technique greatly reduces the minimum measurable th ickness, and it promises the dielectric constant measurement of mu m-thick thin films with the frequency range from GHz to THz. (C) 2000 American Inst itute of Physics. [S0003-6951(00)03922-X].