Coplanar waveguide transmission lines and high Q inductors on CMOS grade silicon using photoresist and polyimide

Gold coplanar waveguide (CPW) transmission lines with losses of < 0.5dB/mm at 60GHz have been produced on CMOS grade silicon substrates using a 15 mu m thick layer of either photoresist or polyimide. This process, together wi th an electroplated interconnect technique, has been used to produce spiral inductors on a 2 Omega/cm n-Si substrate with a Q of 15 and L of 1.2nH at 6GHz.