Design and analysis of MEMS-based slider suspensions for a high-performance magnetic recording system

This paper presents a novel design for a MEMS-based slider-suspension devic e with inherently improved mechanical performance over traditional componen ts for high-performance magnetic recording. The device was modeled numerica lly to simulate two kinds of micro-dynamics characteristics: the adhesion/s hock-induced dynamic deflection of micro-suspension and the particle-deflec ting performance of the micro-deflector. The simulation shows that the dyna mic deflection of the micro-suspension can be reduced by decreasing the con tact area of the attached secondary slider, and that the brittle fracture p robability of the micro-suspension under 1000G shock can be attained to be as low as 1.0 x 10(-5). The simulation also illustrates that the micro-defl ector can prevent 80% of Rowing particles under the primary slider from ent ering the micro-system. A new process is also presented and used to fabrica te the designs.