In this paper, we report the development of micromachining techniques for a
biodegradable polymer for the first time. By virtue of their ability to na
turally degrade in tissues, biodegradable polymers hold immense promise as
new materials for implantable biomedical microdevices. This work focuses on
the establishment of microfabrication processes for biodegradable microstr
uctures and microdevices. Three unique fabrication processes have been esta
blished: (1) a micro-molding process to form 3D microstructures in polycapr
olactone (PCL) via a silicon micromachined mold, (2) a method of transferri
ng metal patterns to surfaces of PCL substrates, (3) techniques for sealing
both dry and liquid-filled PCL micro-cavities with a metal thin Nm (e.g. g
old). The chemical compatibility of PCL with common micromachining chemical
s have been investigated.