Phosphorous and boron doped a-Si:H layers have been optimized with respect
to their stability when used in single junction p-i-n solar cells. Hydrogen
effusion measurements show a structural change for both types of films at
doping concentrations above 0.2 +/- 0.1%. While at this doping level the co
nductivity of the layers is not the largest possible, their application to
solar cells results in an increase of the open circuit voltage, ascribed to
the activation of boron atoms and a better stability of the n-layer. (C) 2
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