The interaction of H-2 With the defect sites of the SiO2 surface has been s
tudied by means of gradient-corrected density functional theory calculation
s on cluster models. The mechanism of hydrogen dissociation, the energy of
reactants and products, and the corresponding activation energies and trans
ition states have been determined for the following defect sites: Si singly
occupied sp(3) dangling bonds (E' centers), =Si-.; nonbridging oxygen cent
ers (NBO), =Si-O-.; divalent Si, =Si:; and neutral oxygen vacancies, =Si-Si
=. H-2 cracking on the NBO sites is exothermic by similar to 0.4 eV and has
an energy barrier of similar to 0.1 eV (or less considering nonadiabatic e
ffects) which suggest the occurrence of the process even at low temperature
. On Si dangling bonds the formation of =Si-H and neutral H atom is endothe
rmic and occurs with an activation energy of less than 0.5 eV; the reaction
can occur at room temperature. The interaction of molecular hydrogen with
the diamagnetic oxygen deficient centers, =Si: and =Si-Si=, leads to the fo
rmation of stable =Si-H groups with exothermic processes and relatively hig
h activation energies of about 2 eV. Thus, H-2 cracking is predicted to occ
ur at room temperature on paramagnetic defects and only at high temperature
s on the diamagnetic centers.