The effect of isotopic composition on the dielectric function of silicon fr
om 3.1 to 3.7 eV has been investigated using spectroscopic ellipsometric da
ta obtained on Si-28, natural Si (Si-nat, M-nat = 28.09 amu), and Si-30 cry
stals. At low temperatures, the energies of the E-0' and E-1 interband tran
sitions, which occur in the energy range under study, become mass dependent
through the dependence of the electron-phonon interaction and the lattice
parameter on the average isotopic mass. We determine the mass dependence of
critical point energies and other optical parameters as accurately as poss
ible by analyzing the ellipsometric data in reciprocal (Fourier-inverse) ra
ther than direct (frequency) space. The obtained dependence of the critical
point energy versus isotope mass [Delta E-1/Delta M= +1.9(4) meV/amu] is i
n reasonable agreement with estimated values obtained from the temperature
dependence of E-1 in natural silicon.