Silicon micro-optical scanner

An advanced optical scanner was developed with small dimensions, high-speed performance, and low power consumption. The device is well suited to fast growing applications where conventional galvano-mirrors or polygon-mirrors cannot be used due to their design limitations, over-size, or high power co nsumption. The advanced optical scanner, named Silicon Micro-Optical Scanne r (SMOS), will meet increasing needs in a broad range of optical products [ N. Asada, H. Matsuki, K. Minami, M. Esashi, Silicon micromachined galvano o ptical scanner, IEEE Trans. Magn., 30 (6) (1994) 4647-4649]. (C) 2000 Elsev ier Science S.A. All rights reserved.