Photoacid and photobase generation in photoresists

Authors
Shirai, M Suyama, K Tsunooka, M
Citation
M. Shirai et al., Photoacid and photobase generation in photoresists, TR PHOTOCH, 5, 1999, pp. 169-185
Categorie Soggetti
Current Book Contents
Journal title
TRENDS IN PHOTOCHEMISTRY & PHOTOBIOLOGY, VOL 5 → ACNP
Volume
5
Year of publication
1999
Pages
169 - 185
Database
ISI
SICI code