Rl. Sutton, ANALYSIS OF LIQUID-PHASE TUNGSTEN HEXAFLUORIDE RESIDUE BY INDUCTIVELY-COUPLED PLASMA-MASS SPECTROMETRY WITH ULTRASONIC NEBULIZATION, Journal of analytical atomic spectrometry, 9(9), 1994, pp. 1079-1083
A method was refined for the determination of trace elemental contamin
ants in high-purity tungsten hexafluoride. The procedure is based on t
he collection of a liquid-phase sample of WF6, generating a residue by
evaporation of the sample and subsequent digestion in concentrated am
monia solution. After sample digestion and workup, analysis was perfor
med by inductively coupled plasma mass spectrometry (ICP-MS) with ultr
asonic nebulization. The reliability of the analysis method and instru
ment limits of detection were found to be superior to ICP-MS with a pn
eumatic nebulizer and water-cooled spray chamber. The following limits
of detection (in ng cm-3) were observed: Na, 0.2; Mg, 0.01; P, 3.2; K
, 1.5; Cr, 0.02; Fe, 0.5; Ni, 0.03; Cu, 0.08; As, 0.07; Pb, 0.01; Th,
0.02; and U, 0.03.