Synthesis of nano-crystalline diamond films

We have deposited nano-crystalline diamond films in a routine hot filament chemical vapor deposition system, using CH4/H-2 gas mixture. We used variou s measurements such as field emission scanning electron microscopy, micro-R aman spectroscopy, x-ray photoelectron spectroscopy, and transmission elect ron microscopy for characterization. The result show that the films consist of a crystalline diamond phase with small grain sizes ranging from 20 to 1 00nm.