Implicit linear control law of a close-spaced vapor transport process

Authors
Estrada, MB Rejon, V Castro-Rodriguez, R
Citation
Mb. Estrada et al., Implicit linear control law of a close-spaced vapor transport process, CON ENG PR, 8(5), 2000, pp. 569-579
Citations number
17
Categorie Soggetti
AI Robotics and Automatic Control
Journal title
CONTROL ENGINEERING PRACTICE
ISSN journal
09670661 → ACNP
Volume
8
Issue
5
Year of publication
2000
Pages
569 - 579
Database
ISI
SICI code
0967-0661(200005)8:5<569:ILCLOA>2.0.ZU;2-#
Abstract
In this paper a linear control scheme for a close-spaced vapor transport pr ocess to obtain thin film semiconductors is presented. This linear control scheme is composed of two linear control laws. The inner controller is an i mplicit control law whose aim is to transform the system into a linear time -invariant system without disturbances. The outer controller is a classical PI control law, whose aim is to make the error tend towards zero. (C) 2000 Elsevier Science Ltd. All rights reserved.