The effect of nitrogen on competitive growth mechanisms of diamond thin films

The correlation between surface morphology and texture (distribution of cry stal orientations) has been analyzed to determine how nitrogen provides a c ompetitive growth advantage for the formation of < 001 > texture in diamond films. The film morphologies were measured using TappingMode(TM) atomic fo rce microscopy. Corresponding texture studies were performed using X-ray di ffraction with a four-circle goniometer to measure (111), (220) and (400) p ole figures. Orientation distributions were generated from the pole figures ; from which inverse pole figures were made to quantify how texture was aff ected by process variables. After 2 h of growth, with and without nitrogen, similar textures were observed. With increasing time, nitrogen stimulates the growth of orientations between [001], [114], and [104]. Without nitroge n, the majority orientation is [101]with a secondary component near [113]. Examination of fracture surfaces indicates correlations with the observed t exture and morphology changes. (C) 2000 Elsevier Science S.A. All rights re served.