Amorphous carbon: how much of free hydrogen?

A method of stepped isochronous heating was used for investigation of the s tate and amount of free and bonded hydrogen in amorphous carbon (a-C:H) fil ms. Hydrogen and other gas effusion processes were studied on unprotected a nd Pd layer protected a-C:H him which allow the separation of hydrogen from CnHm components. The amount of hydrogen released by the breaking of weak C -H bonds was determined to be 10 at.%, and that released by the breaking of strong C-H bonds was 12 at.%. The amount of free hydrogen in the material was estimated at 12-14 at.%. (C) 2000 Elsevier Science S.A. All rights rese rved.