Microcrystalline diamond films by direct ion beam deposition

Microcrystalline diamond films have been successfully synthesized by direct ion beam deposition. Low energy (60-200 eV) ions of hydrocarbon, argon and hydrogen generated in a Kaufman ion source were perpendicularly directed t o (100) silicon substrates pretreated by diamond powder scratching. Diamond particles of similar to 1 micron in size embedded in a matrix of amorphous carbon were obtained at an ion energy of 80 eV, a methane concentration of 1%, and a substrate temperature of 700 degrees C. The feature of diamond w as confirmed by Raman spectroscopy and X-ray diffraction. The mechanism of ion-induced formation of microcrystalline diamond was discussed. (C) 2000 E lsevier Science S.A. All rights reserved.