Nanostructured carbon films from supersonic cluster beam deposition: structure and morphology

Nanostructured carbon thin films have been grown by deposition of cluster b eams produced by a supersonic expansion. Due to separation effects typical of supersonic beams, films with different nanostructures can be grown by th e simple intercepting of different regions of the cluster beam with a subst rate. Films show a low-density porous structure, which has been characteriz ed by Raman and Brillouin spectroscopy. Film morphology suggests that growt h processes are similar to those occurring in a ballistic deposition regime .