Sp. Beeby et al., Design and fabrication of a low-cost microengineered silicon pressure sensor with linearised output, IEE P-SCI M, 147(3), 2000, pp. 127-130
Citations number
9
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
IEE PROCEEDINGS-SCIENCE MEASUREMENT AND TECHNOLOGY
The design and fabrication of a capacitive pressure sensor comprising two m
icroengineered silicon wafers fusion-bonded together to provide a relativel
y low-cost pressure sensor is described. The sensor produces a capacitance
change of around 100 pF for an applied pressure of eight bar. The capacitan
ce change is measured using a charge redistribution technique. The sensor h
as been designed to enable subsequent linearisation within a microcontrolle
r. The same microcontroller is also used to calibrate the device, implement
a successive approximation register within the charge redistribution circu
it, and drive an LCD resulting in an elegant and potentially low-cost syste
m.