New system model based on autonomous decentralized system for highly productive processing equipment

High accuracy, high reliability, and high performance have to be simultaneo usly satisfied to achieve high productivity of the latest processing equipm ent. High flexibility is also required because many options are available a nd processing equipment is modified frequently. A high-assurance-system (HA S) model for processing equipment has been developed according to the conce pt of an Autonomous Decentralized System (ADS). Heterogeneous devices, that have same function and diverse qualities, are utilized to assure the diffe rent requirements of high accuracy, high reliability, and high performance simultaneously. The Data Property (DP) and Assurance Manager (AM) are propo sed in this model. Different accuracy, reliability, and performance indices characterize each device, and the DP describes the differences of the prop erties of the data transmitted from these heterogeneous devices. The AM ass ures not only high reliability but also high performance and high accuracy by utilizing the heterogeneity of data described by the DP. The HAS model w as applied to a device-level system used in processing equipment, and its e ffectiveness was verified by simulating a pressure-control system.