MODES OF PROPAGATING LIGHT WAVES IN THIN-FILMS OF BORON-NITRIDE DEPOSITED BY PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION

Authors
BOUDIOMBO J BAEHR O BOUDRIOUA A THEVENIN P LOULERGUE JC BATH A
Citation
J. Boudiombo et al., MODES OF PROPAGATING LIGHT WAVES IN THIN-FILMS OF BORON-NITRIDE DEPOSITED BY PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION, Materials science & engineering. B, Solid-state materials for advanced technology, 46(1-3), 1997, pp. 96-98
Citations number
13
Categorie Soggetti
Material Science","Physics, Condensed Matter
Journal title
Materials science & engineering. B, Solid-state materials for advanced technology → ACNP
ISSN journal
09215107
Volume
46
Issue
1-3
Year of publication
1997
Pages
96 - 98
Database
ISI
SICI code
0921-5107(1997)46:1-3<96:MOPLWI>2.0.ZU;2-8
Abstract
Waveguide films of boron nitride are fabricated by a plasma enhanced c hemical vapor deposition (PECVD) process. Optical properties of films are investigated. Effective refractive indices of guided modes are use d to determine refractive index and film thickness. A good optical qua lity has been obtained with an hexagonal structure. (C) 1997 Elsevier Science S.A.