INVESTIGATIONS OF DIAMOND-LIKE CARBON-FILMS PRODUCED DIRECTLY FROM ANION-BEAM OF INDUSTRIAL ION-SOURCE WITH A COLD-CATHODE

Authors
ENISHERLOVA KL KONTSEVOI YA CHERVYAKOVA EN MITROFANOV EA MAISHEV YP
Citation
Kl. Enisherlova et al., INVESTIGATIONS OF DIAMOND-LIKE CARBON-FILMS PRODUCED DIRECTLY FROM ANION-BEAM OF INDUSTRIAL ION-SOURCE WITH A COLD-CATHODE, Materials science & engineering. B, Solid-state materials for advanced technology, 46(1-3), 1997, pp. 137-140
Citations number
5
Categorie Soggetti
Material Science","Physics, Condensed Matter
Journal title
Materials science & engineering. B, Solid-state materials for advanced technology → ACNP
ISSN journal
09215107
Volume
46
Issue
1-3
Year of publication
1997
Pages
137 - 140
Database
ISI
SICI code
0921-5107(1997)46:1-3<137:IODCPD>2.0.ZU;2-9
Abstract
Experiments have been carried out on an industrial multifunctional ion -beam treatment system 'Kashtan' equipped as an ion source with a cold cathode 'Radical-M'. DLC films have been produced from ion beams of C H4 and C6H12. The composition, structure, mechanical, optical and elec trophysical properties of these films have been investigated. The tech nology of DLC films of 2.0 mu m thickness deposited on GaAs wafers has been developed. (C) 1997 Elsevier Science S.A.