J. Van Suchtelen et E. Van Veenendaal, The construction of orientation-dependent crystal growth and etch rate functions I. Mathematical and physical aspects, J APPL PHYS, 87(12), 2000, pp. 8721-8731
For mathematical analysis and computer simulation of the shape evolution of
crystals, we need a continuum description of crystal growth or etching, ra
ther than the conventional atomistic description. This allows the mathemati
cal integration of the interface process with other transport steps that ar
e usually also described by continuum equations, like diffusion, viscous fl
ow, and chemical reactions. For this reason we need a function R(n,T,C,p,..
.): the growth or etch rate as a function of the surface orientation n and
of experimental variables such as temperature, composition, pressure, etc.
of the parent phase. In this article we describe a logical construction met
hod for such growth or etch rate functions. The virtue of our method is tha
t the n variable covers the full unit sphere, i.e., all minima due to diffe
rent crystal facets are expressed in the R function. The orientation depend
ence of the growth or etch rate of interfaces (three dimensional) and of st
eps on a facet (two dimensional) is described in a way which is logically b
ased on the kink/step motion (KSM) growth model. The building blocks of the
growth/etch rate function are the elementary KSM functions, plus a number
of constants which are to be determined by a parameter-fitting procedure bu
t do have an obvious physical meaning. For instance, for each face a roughe
ning parameter enters into the function, expressing the effect of the rough
ening transition for this face. This compares favorably with a Fourier seri
es or spherical harmonics expansion for which the constants that appear hav
e no specific relevance for the growth/etch mechanism. In this article we i
ntroduce the mathematical toolbox which is required for the "nonlinear netw
ork" formalism and we use this formalism for the construction of growth/etc
h rate functions. In Part II we work out a practical case and compare a set
of accurately measured etch rate data (silicon crystals in concentrated KO
H solutions) with a network etch rate function. (C) 2000 American Institute
of Physics. [S0021-8979(00)01612-1].