Impedance spectroscopy has been used to measure the electrical properties o
f oxide scales formed from oxidation of TN738LC superalloy at high temperat
ure. Electrical resistance and capacitance of the oxide scales were obtaine
d from the simulation of the measured impedance diagrams based on the equiv
alent circuit model, which represents the features of the oxide scales. For
oxidation of IN738LC superalloy, the electrical resistance of oxide scales
increased with increasing oxidation time for the specimens exposed to air
at 900 degrees C. However, for the specimens oxidised at 1,200 degrees C, t
he oxide scales showed very low electrical resistance, which indicated that
cracking and spallation in oxide scales occurred continuously. By using sc
anning electron microscopy and X-ray diffraction techniques, the compositio
n and microstructure of the oxide scales were examined. It was found that e
lectrical properties were determined, not only by the microstructure of oxi
de scales, but also by the composition of the oxide scales. By determining
the relationship between electrical properties, microstructure and composit
ion of oxide scales, impedance spectroscopy could be used as a non-destruct
ive technique for monitoring the oxidation of metallic alloys at high tempe
rature.