We present the characteristics of Cu Schottky contacts on wide band gap InG
aP semiconductors with and without sulfur treatment before Schottky contact
deposition, and investigate the influence of post-heat treatment on the Sc
hottky diodes. With sulfur treatment, the performance of Schottky diodes co
mpared with samples without sulfur treatment is improved. However, a drasti
c degradation of the performances was observed in samples annealed at 500 d
egrees C. (C) 2000 Elsevier Science B.V. All rights reserved.