We report on the fabrication of circular waveguide photodetectors with a re
sponse near 1.3 mu m wavelength using SiGe/Si multiple quantum wells. The q
uantum efficiency of the circular waveguide photodetector is improved when
compared with that of the rib waveguide photodetector in the same wavelengt
h at 1.3 mu m The frequency response of the photodetectors is simulated. Th
e emciency-bandwidth product of the circular waveguide photodetectors is im
proved correspondingly. (C) 2000 Published by Elsevier Science B.V. All rig
hts reserved.