We present atom-resolved images of oxygen-deficient TiO2(110) by scanning t
unneling microscopy (STM) and noncontact atomic force microscopy (NC-AFM).
Although STM images emphasized variations of Ti-atom density underneath the
surface oxygen, NC-AFM images directly traced defect-induced structures of
topmost oxygen atoms. We first found the (1 x 3) phases was not composed o
f missing TiO2 units but added Ti2O3 rows. We observed the deformed (1 x 3)
phase by half steps along [001], which well explains that diffusion and ad
sorption of segregated impurities help in the formation of (1 x 3) phases.