Yq. Fu et Nka. Bryan, Investigation of integrated diffractive/refractive microlens microfabricated by focused ion beam, REV SCI INS, 71(6), 2000, pp. 2263-2266
Integrated diffractive/refractive microlens with dual focus point is introd
uced in detail in the view of design, microfabrication, and testing. Two ma
nufacturing methods-milling and deposition directly by focused ion beam tec
hnology is discussed and compared. It was shown by testing results that the
deposition method is more suitable to form the refractive spherical/aspher
ical lens and milling is suitable for microfabrication of diffractive optic
al elements. Focusing spot size (full width at half maximum) are 0.55 and 0
.87 mu m (lambda = 638 nm) for refractive and diffractive lens, respectivel
y, with NA 0.35 and 0.5. (C) 2000 American Institute of Physics. [S0034-674
8(00)01006-6].