Experimental study on optical field distribution of the soft X-ray linear monochromator

With three kinds of condenser zone prates (CZPs) and pinholes, the linear m onochromator transmits soft X-rays of 1.97-5.44 nm wavelength range. The so ft X-ray diffraction images (i.e. the optical field distribution of the mon ochromator) were recorded from the combination of CZP(32) and a pinhole of 30 mu m by using positive photoresist under the conditions of an appropriat e focusing and a large focusing error. The properties of optical field, suc h as the radius of Airy pattern and the good spatial coherence region, were also obtained. The experimental results agreed well with the theoretical c alculation.