Investigation of Au/Au(100)film growth with energetic deposition by kinetic Monte Carlo simulation

The Au/Au(100) epitaxial growth with energetic deposition was simulated by using kinetic Monte Carlo method. The influences of energetic atoms on morp hology and atomistic processes in the early stage of film growth were inves tigated. The reentrant layer-by-layer growth was observed in the temperatur e range of 450 K to 100 K. We found the energetic atoms can promote the nuc leation and island growth in the early stages of film growth and enhance th e smoothness of film surface at temperatures of film growth in 3-dimensiona l mode and in quasi-two-dimensional mode. The atomistic mechanism that prom otes the nucleation and island growth and enhances the smoothness of film s urface is discussed.