OCCUPATION SITE AND DISTRIBUTION OF DELTA-DOPED ER IN INP MEASURED BYX-RAY CTR SCATTERING

Authors
FUJITA K TSUCHIYA J ICHIKI S HAMAMATSU H MATSUMOTO N TABUCHI M FUJIWARA Y TAKEDA Y
Citation
K. Fujita et al., OCCUPATION SITE AND DISTRIBUTION OF DELTA-DOPED ER IN INP MEASURED BYX-RAY CTR SCATTERING, Applied surface science, 117, 1997, pp. 785-789
Citations number
6
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
Journal title
Applied surface science → ACNP
ISSN journal
01694332
Volume
117
Year of publication
1997
Pages
785 - 789
Database
ISI
SICI code
0169-4332(1997)117:<785:OSADOD>2.0.ZU;2-W
Abstract
Atomic level hetero-structure analysis of Er delta-doped InP grown by OMVPE was successfully made by the X-ray crystal truncation rod (CTR) scattering measurement using synchrotron radiation. It was shown that Er atoms in the delta-doped InP formed rocksalt structure ErP. Distrib utions of the Er atoms around the delta-doped layers were also reveale d clearly on the atomic scale. The total amounts of incorporated Er in creased exponentially as the Er supply time increased.