Deposition of C-60 polymer films under various plasma conditions

We studied the deposition of C-60 polymer films under different Ar plasma c onditions. The films were de posited at a pressure range between 1.3 and 40 Pa, and the input power was varied from 10 to 70 W. The films were investi gated by Raman spectroscopy to confirm the C-C valence states of the polyme ric phases. C-60 polymers were formed under various experimental conditions . However, the depositions resulted in non-uniform films consisting of unpo lymerized C-60, dimers, linear chains and polymeric planes. Amorphous carbo n was found in the films deposited at 13 and 20 Pa (50 W input power) and 1 3 Pa (70 W).