We studied the deposition of C-60 polymer films under different Ar plasma c
onditions. The films were de posited at a pressure range between 1.3 and 40
Pa, and the input power was varied from 10 to 70 W. The films were investi
gated by Raman spectroscopy to confirm the C-C valence states of the polyme
ric phases. C-60 polymers were formed under various experimental conditions
. However, the depositions resulted in non-uniform films consisting of unpo
lymerized C-60, dimers, linear chains and polymeric planes. Amorphous carbo
n was found in the films deposited at 13 and 20 Pa (50 W input power) and 1
3 Pa (70 W).