X-ray conversion efficiency from laser energy was measured for various nobl
e-gas clusters excited by an ultrashort KrF laser pulse. For Xe clusters, t
he conversion efficiency from laser energy into soft X-rays with wavelength
s from 5 to 20 nm was estimated to be 1.1 %/sr, which was comparable to tha
t obtained for solid targets. This high X-ray conversion efficiency was due
to the large absorption fraction of the laser light by Xe clusters.